Official Website: http://www.laytec.de/
LayTec GmbH is the leader in the field of in situ monitoring systems for MOCVD, MBE and other thin-film processes. Its real-time sensors are in use both for R&D and mass production (especially suited for LED and laser production world-wide).
Our know-how is based on four measurement techniques: emissivity corrected pyrometry, normalized reflectance spectroscopy, reflectance anisotropy spectroscopy (RAS) and wafer bowing measurements. Our sophisticated tools measure epitaxy growth properties such as growth rate, layer thickness, doping levels, ternary material composition, surface roughness, wafer surface temperature (True Temperature) and wafer bowing with an extreme precision already during the deposition process!
EpiRAS® 2000 TT is the most advanced multi-wafer in situ sensor available today. It is a unique tool for the R&D of new GaAs- and InP-based opto-electronic devices such as quantum dot lasers, VCSEL applications and 1,3 μm lasers, among others. The EpiTT sensor is the first choice today for GaN LED production world-wide. EpiTT features emissivity corrected temperature measurements based on the combination of pyrometry and reflectance measurements at two optimized wavelengths. Our brand-new sensor EpiCurve, which combines true temperature, growth rate and wafer bowing measurements, complemented our product range recently. All sensors are equipped with powerful software for simulation and analysis of spectroscopic thin-film measurements.
The enhanced knowledge of the epitaxy growth process achieved through in situ monitoring dramatically
reduces development cycles, increases yields and enables superior quality
control and reproducibility. This technology finds its home typically in the
field of optoelectronic (LED, Laser) and electronic devices (HBT, HEMT).
LayTec - Gesellschaft für in-situ und Nano-Sensorik mbH
Phone: +49/30/39 800 800
E-mail: info@laytec.de